Impedance Matching Network RF 13.56 MHz - BDS.AM750
Matching Network, Plasma Cleaning, Alimentatore RF 13,56 MHz
BDS AMN 750 RF Auto Matching Network
The BDS-AMN 750 is an impedance matching network to be used in HF (13.56 MHz) plasma application, transform the complex impedance of the load in a 50 Ohm resistive.
The tuning circuit is L type using high quality variable caps and precision positioning motors.
Typical tuning type is less than 2 seconds. Also a TEE configuration for medium impedance load is available.
Typical application include Sputtering process, PECVD deposition, plasma activation, dielectric heating, laser excitation and more.
Direct interfacing with all Bdiscom RF generators.
3 Channel RF output on one single matching available ( vacuum relays ) as option.
Alimentatore RF 13,56 MHz
, Generatore RF 13,56 MHz
, Impedance Matching Network
, Matching Network
, Plasma Cleaning
, Plasma systems
, RF Generator 13.56 MHz
, RF Heating
, RF Switches
, RF-DC Filter